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Tool Operation Manuals
(Updated on November 14, 2006)
Optical and E-beam Lithography
OL-4: SUSS MA6 Mask Aligner
OL-3: SUSS MJB3 Mask Aligner
OL-2: AB-M Mask Aligner
SC-3 & -4 Reynolds Tech Spin Coater (in C-1)
Thin-Film Deposition
CVD-1: LPCVD System
CVD-2: NEXX Cirrus 150 PECVD System
TE-3, -4, -5: Sharon Thermal Evaporator
Dry Processing
RIE-6: NEXX Cirrus 150 RIE System
Metrology
ES-1: VASE32 Spectroscopic Ellipsometer
ES-2: LSE-WS Waferscan Ellipsometer
PL-3: Veeco 6M Dektak Profilometer
Back-End Processing
SW-1: DISCO DAD321 Automatic Dicing Saw
Physical Vapor Deposition
AJA Sputter User’s Manual
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