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More Info:
Detectors available: In-lens SE, Everhart-Thornley SE, VPSE, 4-quadrant BSE, and STEM
Comments:
The Supra55VP Field Emission Scanning Electron Microscope (FESEM) allows surface examination down to nanometer scales in either high vacuum or in Variable Pressure (VP) mode. The SEM uses a low to moderate energy (0.1 to 30 keV) electron beam to image a sample with resolutions down to 1 nm at 15 keV in high vacuum or 2 nm at 30 keV in VP mode. The Supra55VP has an Energy Dispersive x-ray Spectrometer (EDS) for elemental analysis (B-U) and mapping. The Supra55VP also has an Electron BackScattered Diffraction (EBSD) system for phase identification, crystal orientation and phase mapping using Kikuchi patterns.
Contact Info:
Dave Lange
LISE B50
11 Oxford Street
Cambridge, MA 02138
617-495-2375
langecns.fas.harvard.edu
David Bell
LISE B56
11 Oxford Street
Cambridge, MA 02138
617-496-6794
dcbcns.fas.harvard.edu